< feature of VIT-P682 >

(1)High-speed inspection

An excellent cost performance is demonstrated by the high-speed image processing technology. It is possible to correspond also to a small amount of many varieties because not only the inspection but also lead/light of the inspection data is high-speed. It is a switch type of three stages of 25μm, 50μm, and 100μm according to L/S. The combination operation at two verify stations is also possible for one inspection machine because of a high-speed inspection.

(2)High detection power

Because two kinds of binary making levels can be set, both a pseudodisconnection and a short micro can be detected.

(3)Inside and outside alternation inspection

The inspection in an alternate inside and outside is possible beforehand by reading the inspection data of the surface and the back. Especially, when operating it in the verify station all-in-one design, the effect is demonstrated.

(4)Small size and lightness

It miniaturizes from the conventional model kind by about 10%, and weight has decreased by about 15%, too. The pump for the substrate adsorption was small and lightened.

(5)Gentle operativeness to person

The operation sound became quiet, and the work side became a gentle device to the person by suitable height for the sitting work. Moreover, it became easy to see by arranging the position of the monitor in the front. (As for the position of the monitor, arrangement in the left or the right is also possible by the option.)

(6)Inspection data compatible with old model

After it increases it, the inspection data can be operated full at once because the data of old model (VIT-P680,VIT-P681) can be misappropriated.

< feature of VIT-VR64 >

(1)High-speed camera movement

The camera movement can work efficiently even by a large-scale substrate because it is high-speed.

(2)Improvement of visibility

The defect part is displayed at the center of the screen. Everyone can use it at once plainly because of being comparable with the quality item screen. It became easy to see in addition because the position of the monitor arranged to a near position so far, and was also free the angle adjustment.

(3)Small size and lightness

Both space required for installation and weight were miniaturized by about 20% compared with the conventional model kind. The increase according to productivity is possible.

(4)Excellent operativeness

The work side became a gentle device to the person as well as the inspection machine by suitable height for the sitting work. Work improves because the inclination corner of the table is freely revokable in the kind, the size of the substrate or operator's sense. (0 ? about 12 degrees)It is easy to enhance switches of the operation panel, too and to operate it.

(5)Inspection result data compatible with old model

After it increases it, the inspection result data can be operated full at once because the data of old model (VIT-P680,VIT-P681) can be misappropriated.